Standard solution - APIX  [ Return towards  On-line analytical control of very high purity bulk gases  ]

Some processes in electronics require gases of extreme purity. To guarantee such purities, Air Liquide has an unparalleled solution on offer for analyzing at ppt levels, known as APIXTM!

APIXTM is part of our CQC offer, but unlike traditional tailored CQC, it is a standard analyzer with its own automatic sampling and calibration system, specially designed for analyses at ppt level. APIXTM can be used to monitor the concentration of several key impurities (O2, CO, CO2, H20, CH4 etc.) simultaneously in real time, in one or more vector gases (N2, H2, Ar, He, O2).

• The world benchmark for analyzing at ppt level with some hundred units sold world-wide
• Up to 4 gases analyzed simultaneously (with Switch system)
• Integrated automatic calibration system (separate from gas)
• Start-up and on-site training

Guaranteed limit detection (1 minute analysis cycle to measure all the impurities indicated in a single vector gas)

Switchover time to reach a level of 1 ppb (minutes)

• CE

• STMICROELECTRONICS
• AMD
• SOXAL
• ATMEL
• INFINEON

• On-line analytical control of very high purity gases - CQC