Aller au contenu
|
Français 
| Contact us  | Home

Gas abatement at the point of vent - PURGE DETOXAL  [ Return towards  Electronics & Optoelectronics  ]

Direct and irreversible removal of gases at the point of vent in gas distribution systems

Cartridge for the abatement of toxic, corrosive and/or flammable gases used particularly in the electronics industry.
Principle of irreversible chemical adsorption
Available for a wide variety of gas in standard 2L or 10L versions

Before a new gas cylinder is installed in a gas distribution system, there is always a significant quantity of active gas present in the lines and this must first be removed. The residual gas is often concentrated, toxic, pyrophoric and/or corrosive and may constitute a hazard. Moreover, the distribution of these gases is often guaranteed for levels of impurity close to levels of ppb. As a result procedures for distributing them within the customer process are very tight and this applies equally to venting procedures.

To meet these requirements, Air Liquide has developed the PURGE DETOXALTM cartridge. This is specially designed to be installed inside the gas cupboards for special gas venting operations before and after the cylinder is changed. The cartridge is installed straight into the distribution system, typically downstream from the venture tube used to vent the distribution lines. The venting gases then pass through a specific adsorbent bed where they are irreversibly destroyed in solid form by chemisorption.

Advantages

  • Removal at the venting point
    - Integration at the distribution point: One cartridge / One gas cupboard
    - Numerous advantages relative to a centralized system: cost, risks (accidental mixing, network corrosion), network complexity, maintenance
  • Available for a wide variety of special gases
    - Exists for a wide range of special gases (see Table) in standard 2 liter and 10 liter versions
    - Adaptable (other sizes available on request)
  • Safety
    - Guaranteed irreversible destruction of gases below the TLV (Threshold Limit Value)
    - Connections using VCR connector for greater tightness
    - Isolating valves
    - High quality stainless steel cartridge (316L)
  • Efficiency
    - Quick to activate
    - Identification of saturation through Inspection Window (optional)
    - Re-usable after filling with a new load (Air Liquide offers a re-processing and refilling service)

Key benefits

  • Can be used on a wide range of special gases in the electronics industry
  • Irreversible removal guaranteed up to the TLV
  • Re-usable stainless steel cartridge with a new load
  • Visual indicator at the end of operating lifetime for greater efficiency (optional)
  • Available in standard 2L or 10L version (other sizes on request)

Range

Gas

TLV(ppmv)

2L Purge Detoxal Capacity (Norm L)

10L Purge Detoxal Capacity (Norm L)

Cartridge type

Cl2

1

35

175

A

HCl

5

140

700

A

BCl3

1

80

400

A

BF3

1

90

450

A

SiH2Cl2

0.5

55

275

A

F2

1

70

350

A

ClF3

0.1

25

125

A

HF

3

100

500

A

WF6

10.3

40

200

A

NH3

25

30

150

B

SiH4

5

20

100

C

AsH3

0.05

25

125

C

B2H6

0.1

40

200

C

PH3

0.3

20

100

C

NO

5

35

175

D

CO

50

30

150

D

TEOS

10

15

75

D

H2S

5

160

800

E

SiH3CH3 (1 MS)

-

7

35

F

Non-exhaustive list (other gases available on request)

Standards

  • EC

References

  • ST MICROLECTRONICS
  • ATMEL
  • SOXAL
  • ALTIS
  • IMEC
  • AMAT

Electronics & Optoelectronics

Contacts

For further information, contact us:

South America - Northern Europe: Yannick Rouaud
Sales - Electronic market
Tel: +33 (0) 4 76 43 63 62

North America: Stéphane Lessi
Sales - Newark
Tel: +1 302 286 5524

Southern Europe, Asia, Africa, Oceania: Pascal Tardy
Sales - Electronic market
Tel: +33 (0) 4 76 43 59 48

China: Domenico Dandrea
Sales - Shanghai
Tel: +86 (21) 6090 3868

Nathalie Ray
Sales department
Tel: +33 (0) 4 76 43 62 11