Electronics & Optoelectronics

To meet requirements for extreme purity in the semi-conductor industry, Air Liquide offers a range of cryogenic (ULTRAL) or catalytic (JPC) purifiers for all vector gases (N2, H2, O2, He, Ar) down to concentrations below ppb levels!

To guarantee the ultra high purity of gases at the point of use and thereby avert any drift that might have dramatic consequences, Air Liquide offers tailored (CQC) or standard (APIX) on-line analysis systems.

To destroy residual toxic or special gases when changing cylinders in the gas cabinets, Air Liquide offers a solid break-down cartridge range (DETOXAL) ensuring irreversible destruction down to concentrations below the TLV (Threshold Limit Value).